Azbil Corporation No. SS2-MGG200-0200 - 11 - DIMENSIONS (Unit : mm (inch)) Wafer 2.5 to 15 mm (0.1 to 1/2 inch) 25 to 200 mm (1 to 8 inches) Note: . Face to face dimension (L) indicates the dimension with SUS316 grounding rings without gaskets. . For other material grounding rings other than SUS316, gaskets are included. (Gasket thickness: 3 mm) Size mm 2.5 5 10 15 25 40 50 65 80 100 125 150 200 (inches) (0.1) (0.2) (3/8) (1/2) (1) (1.) (2) (2.) (3) (4) (5) (6) (8) Face to face dimension L mm 56 56 56 56 56 80 86 96 106 120 140 160 200 (inches) (2.20) (2.20) (2.20) (2.20) (2.20) (3.15) (3.39) (3.78) (4.17) (4.72) (5.51) (6.30) (7.87) Height H1 mm 71 71 71 71 77 84 93 100 108 120.5 133 160 185 (inches) (2.80) (2.80) (2.80) (2.80) (3.03) (3.31) (3.66) (3.94) (4.25) (4.74) (5.24) (6.30) (7.28) H2 mm 72 72 72 72 34 43.5 52 62 67 79.5 95 110 135 (inches) (2.83) (2.83) (2.83) (2.83) (1.34) (1.71) (2.05) (2.44) (2.64) (3.13) (3.74) (4.33) (5.31) H3 mm 217.5 217.5 217.5 217.5 185.5 202 219.5 236.5 249.5 274.5 302.5 344.5 394.5 (inches) (8.56) (8.56) (8.56) (8.56) (7.30) (7.95) (8.64) (9.31) (9.82) (10.81) (11.91) (13.56) (15.53) H4 mm 107 107 107 107 113 120 127 136 144 156.5 169 196 221 (inches) (4.21) (4.21) (4.21) (4.21) (4.45) (4.72) (5.08) (5.35) (5.67) (6.16) (6.65) (7.72) (8.70) Housing width W mm 98 98 98 98 106 125 135 148 164 189 214 240 290 (inches) (3.86) (3.86) (3.86) (3.86) (4.17) (4.92) (5.31) (5.83) (6.46) (7.44) (8.43) (9.45) (11.42) Housing outer diameter ..D mm 49.5 49.5 49.5 49.5 68 87 104 124 134 159 190 220 270 (inches) (1.95) (1.95) (1.95) (1.95) (2.68) (3.43) (4.09) (4.88) (5.28) (6.26) (7.48) (8.66) (10.63) Weight kg 2.5 2.5 2.5 2.5 2.6 3.0 3.6 4.5 5.2 7.0 9.6 12.8 22.0 (lb) (5.5) (5.5) (5.5) (5.5) (5.7) (6.6) (7.9) (9.9) (11.5) (15.4) (21.2) (28.2) (48.5) 95 (3.74) (4.41) (2.93) (4.33) (2.05) 95 (3.74) (2.93) (4.41) 4 5