10 （Unit：mm) .............. .............................................................................................................................................................................................. .. ................................................................................................................................................................................................ Dimension and terminal connection drawings ........................ Wafer ........................ Detector diameter 2.5 5 10 15 25 40 50 65 80 100 125 150 200 Face to face dimension Ｌ 56 56 56 56 56 80 86 96 106 120 140 160 200 Ｈ1 71 71 71 71 77 84 93 100 108 120.5 133 160 185 Height Ｈ2 72 72 72 72 34 43.5 52 62 67 79.5 95 110 135 Ｈ3 190 190 190 190 158 174.5 192 209 222 247 275 317 367 Ｈ4 96 96 96 96 102 109 118 125 133 145.5 158 240 210 Width Ｗ 98 98 98 98 106 125 135 148 164 189 214 240 290 Outer diameter φＤ 49.5 49.5 49.5 49.5 68 87 104 124 134 159 190 220 270 Mass (kg) 2.5 2.5 2.5 2.5 2.6 3.0 3.6 4.5 5.2 7.0 9.6 12.8 22.0