Various types of documents can be viewed in PDF format.

Note:
The specification sheets or user manuals available on this page may pertain to a product version other than the one you are using.

Catalog

Document Name	Model No.	Document No.	Download
Long-Distance Detection Laser Sensors 【Discontinued product】	HLA-_ _ _	HLA-0	Download
High-Accuracy Position Sensors	K1G	CP-PC-2265E	Download
Helps improve accuracy of wafer eccentricity measurement	K1G-_ _ _	CP-PC-9000-003E	Download
Accurate determination of wafer position in vacuum chamber	K1G-_ _ _	CP-PC-9010-005E	Download

User's Manual or Instrumentation Document

Document Name	Model No.	Document No.	Download
Laser Sensor Installation Instructions 【Discontinued product】	HLA-_ _ _	CP-UM-5168JE	Download
K1G Series High-Accuracy Position Sensor User's Manual	K1G-C04, K1G-C04M, K1G-C04E	CP-SP-1385E	Download
K1G Series High-Accuracy Position Sensor MECHATROLINK-III Communication Manual	K1G	CP-SP-1386E	Download
K1G Series High-Accuracy Position Sensor Global Model User's Manual For CE/KC mark model	K1G-C04G, K1G-C04MG, K1G-C04EG	CP-SP-1397E	Download
K1G Series High-Accuracy Position Sensor User’s Manual for EtherCAT Communication	K1G-C04E, K1G-C04EG	CP-SP-1419E	Download

* In information issued before March 2012, there may be cases where the former corporate name is used.