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ƒoƒ‹ƒu‘SŠJŽž‚̍·ˆ³‚Æ—¬—Ê‚ÌŠÖŒWi‹ó‹C‚̏ꍇj 0 10 20 30 40 50 60 0 40 120 80 160 200 240 —¬—ʁmL/min(standard)n —¬—ʁmmL/min(standard)n ·ˆ³mkPan MQV9200 ‡@ ‡A ‡B ‡C 0 2 4 6 8 10 0.0 0.2 0.4 0.6 0.8 1.0 —¬—ʁmL/min(standard)n ·ˆ³mkPan MQV9500 ‡@ ‡A ‡B ‡C 0 10 20 30 40 50 60 0.0 0.4 0.8 1.2 1.6 2.0 2.4 ·ˆ³mkPan —¬—ʁmL/min(standard)n MQV0002 ‡@ ‡A ‡B ‡C 0 10 20 30 40 50 60 0 4 12 8 16 20 24 —¬—ʁmL/min(standard)n MQV0020 ‡@ ‡A ‡B ‡C ·ˆ³mkPan 0 2 4 6 8 10 2 4 6 8 10 —¬—ʁmL/min(standard)n MQV0005 ‡@ ‡A ‡B ‡C ·ˆ³mkPan 0 20 40 60 80 100 0 10 20 30 40 50 60 ·ˆ³mkPan —¬—ʁmL/min(standard)n MQV0050(B, C) ‡@ ‡A ‡B ‡C ·ˆ³mkPan MQV0100 0 10 20 30 40 50 60 0 10 20 30 40 50 60 ·ˆ³mkPan —¬—ʁmmL/min(standard)n MQV9005/9020 @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) ‡@ ‡A ‡B ‡C @ oŒûˆ³ðŒ ‡@ 150kPa(gauge) ‡A 50kPa(gauge) ‡B 0kPa(gauge) ‡C |50kPa(gauge) 0 0 20 40 60 80 100 120 80 160 240 320 ‡@ ‡A ‡B ‡C 5 2 32 WEBƒT[ƒrƒX»•i‚̍ŐVî•ñ‚Íwww.azbil.com/jp/