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ƒoƒ‹ƒu‘SŠJŽž‚̍·ˆ³‚Æ—¬—Ê‚ÌŠÖŒWi…‘f‚̏ꍇj ƒoƒ‹ƒu‘SŠJŽž‚̍·ˆ³‚Æ—¬—Ê‚ÌŠÖŒWiƒwƒŠƒEƒ€‚̏ꍇj ·ˆ³(kPa) MQV9020/9050 MQV9500 —¬—Ê [L/min(standard)] 0 5 10 15 20 25 30 0.6 0.5 0.4 0.3 0.2 0.1 0 ‡@ oŒûˆ³ðŒ ‡@ 150kPaigaugej ‡A 50kPaigaugej ‡B 0kPaigaugej ‡C|50kPaigaugej ·ˆ³(kPa) MQV0005 —¬—Ê [L/min(standard)] 0 5 10 15 20 25 30 6.0 5.0 4.0 3.0 2.0 1.0 0.0 ·ˆ³(kPa) MQV0050 —¬—Ê [L/min(standard)] 0 5 10 15 20 25 30 60 50 40 30 20 10 0 ·ˆ³(kPa) MQV0200 —¬—Ê [L/min(standard)] 0 20 40 60 80 100 240 200 160 120 80 40 0 ·ˆ³(kPa) MQV0500 —¬—Ê [L/min(standard)] 0 10 20 30 40 50 60 600 500 400 300 200 100 0 ·ˆ³(kPa) MQV1000 —¬—Ê [L/min(standard)] 0 40 80 120 160 1200 1000 800 600 400 200 0 ·ˆ³(kPa) MQV0010 —¬—Ê [L/min(standard)] 0 20 40 60 80 100 120 12 10 8 6 4 2 0 100 80 60 40 20 0 0 2 4 6 8 10 12 —¬—Ê [mL/min(standard)] ‡@ ‡@ ‡@ ‡@ ‡@ ‡@ ‡@ ‡A ‡A ‡A ‡A ‡A ‡A ‡A ‡A ‡B ‡B ‡B ‡B ‡B ‡B ‡B ‡B ‡C ‡C ‡C ‡C ‡C ‡C ‡C ‡C ·ˆ³(kPa) ·ˆ³(kPa) MQV9020/9050 MQV9500 —¬—Ê [L/min(standard)] 0 10 20 30 40 50 60 10 20 30 40 50 60 0.6 0.5 0.4 0.3 0.2 0.1 0 ·ˆ³(kPa) MQV0005 —¬—Ê [L/min(standard)] 0 6.0 5.0 4.0 3.0 2.0 1.0 0.0 100 80 60 40 20 0 0 4 8 12 16 20 24 —¬—Ê [mL/min(standard)] ‡@ ‡A ‡B ‡@ ‡A ‡B ‡@ ‡A ‡B ‡C ‡C ‡C ·ˆ³(kPa) 5 2 35 WEBƒT[ƒrƒX»•i‚̍ŐVî•ñ‚Íwww.azbil.com/jp/