Azbil Corporation No. SS2-GTX00U-0100 - 35 - 2-inch wafer Bottom diaphragm Model GTX60U/71U [Unit: mm] 1/2 or 3/4 inch flange adapter assembly drawing Table of flange dimensions Flange standard φD φG T f φC φH φL JIS 10K - 15 mm (1/2 inch) 95 51 12 1 70 15 84 JIS 20K - 15 mm (1/2 inch) 95 51 14 1 70 15 84 JIS 30K - 15 mm (1/2 inch) 115 55 18 1 80 19 79 ANSI 150 - 15 mm (1/2 inch) 89 35.1 11.5 1.6 60.5 16 86 ANSI 300 - 15 mm (1/2 inch) 95 35.1 14.5 1.6 66.5 16 92 JPI 150 - 15 mm (1/2 inch) 89 35.1 11.5 1.6 60.5 16 86 JPI 300 - 15 mm (1/2 inch) 95 35.1 14.5 1.6 66.5 16 92 JIS 10K - 20 mm (3/4 inch) 100 56 14 1 75 15 90 JIS 20K - 20 mm (3/4 inch) 100 56 16 1 75 15 90 JIS 30K - 20 mm (3/4 inch) 120 60 18 1 85 19 84 ANSI 150 - 20 mm (3/4 inch) 99 42.9 13 1.6 69.8 16 90 ANSI 300 - 20 mm (3/4 inch) 117 42.9 16 1.6 82.6 19 99 JPI 150 - 20 mm (3/4 inch) 99 42.9 13 1.6 69.8 16 90 JPI 300 - 20 mm (3/4 inch) 117 42.9 16 1.6 82.6 19 99 Note) *: In the case of tantalum for wetted part material, this is 24 mm. Wafer Capilary tube 2-MB screw Gasket face 64 Diaphragm dia. 60 23 92 20 148 44.6 38.4 44.6 38.4 2.5 11 45 26 100 20 108 G1 50 (Across flats) Gasket 1/2 external screw Capillary tube Vent drain Vent drain Connecting flange (Higher and lower pressure sides) H hole 4 48 81 L D Cpc G (25) * T f f f 1 7