Various types of documents can be viewed in PDF format.

Note:
The specification sheets or user manuals available on this page may pertain to a product version other than the one you are using.

Catalog

Document Name	Model No.	Document No.	Download
Gas Mass Flowmeter	CMS_ _ _ _	CP-PC-1280E	Download
Network Instrumentation Module Smart Device Gateway* Model NX-SVG	NX-SVG	CP-PC-1597E	Download

Product Specification Sheet

Document Name	Model No.	Document No.	Download
Gas Mass Flow Meter SUS/SUS316	CMS_ _ _ _	CP-SS-1809E	Download
Gas Mass Flow Meter for Hydrogen and Helium Gases	CMS_ _ _ _	CP-SS-1797E	Download

User's Manual or Instrumentation Document

Document Name	Model No.	Document No.	Download
Gas Mass Flow Meter SUS/SUS316 Models	CMS9500, 0002, 0005, 0020, 0050, 0200, 0500	CP-SP-1189E	Download
Gas Mass Flow Meter For Hydrogen and Helium Gases Model CMS0010/0050/0200/0500/1000/2000	CMS0010, 0050, 0200, 0500, 1000, 2000	CP-SP-1118E	Download

* In information issued before March 2012, there may be cases where the former corporate name is used.