The Micro Flow Mass Flow Meter Series employs a detection unit featuring the µF sensor, a thermal mass-flow sensor designed by Azbil for measuring gas flow.
These inexpensive mass flow meters provide unprecedented high precision and wide rangeability thanks to extensive use of the company's micro-machining technologies, as well as integration of the Micro Flow sensor and advanced channel-design technologies.

They are ideal tools for controlling the flow rate or measuring the per-building consumption of fuel gas, various types of industrial gas, or plant air used for virtually anything from manufacturing processes to test equipment.


Mass flow measurement

These meters can measure the flow rate of air or gas and convert it to standard conditions regardless of the operating temperature and pressure.
(The flow rate converted to standard conditions is the volumetric flow rate at 1 atmosphere of pressure and 0°C [or 20 °C].)


Wide measurement range

Conventional gas flowmeters generally experience more difficulty in measuring low flow rates than flow rates near their maximum limits. A wider range of measurement and control is made possible by Azbil's proprietary µF sensors. Rangeability is as high as 100:1 with CMS series mass flowmeters and 160:1 with CML series high-flow mass flowmeters (1,280:1 in terms of measurement range)!
These mass flow meters are ideal for controlling air or gas consumption and saving energy by checking for leakage.


Fast response

Response is fast because the sensor is in direct contact with the gas.


Reduced pressure loss

Pressure loss in these meters is kept to a minimum by mounting the µF sensor in the channel wall to minimize protrusions and the resulting resistance against flow. Therefore, they are perfect for measuring and controlling gas flow at low pressures.


High accuracy

Because of their high accuracy over a wide range of flows, mass flow meters have a specified accuracy for their reading (rdg).


Various functions

Our wealth of microcomputer technologies gained through the development of control devices provides a range of functions that are unprecedented in conventional mass flow meters.
These functions include display of instantaneous or totalized flow rate, gas-type switching, high limit and low limit alarm output, analog output, totalizer pulse output, and communication function. (Available functions depend on the particular product.)


Extensive product lineup

To meet customers' application needs, a wide variety of products is available to measure various flow rate ranges, from 0–500 mL/min to 0–1,600 m³/h.



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