Compact Digital Mass Flow Controller
Model F4H


Compact design

The model F4H is 50% smaller than our conventional model.


Effectively utilize digital communication

With model F4H’s communication much information useful for fault diagnosis can be uploaded.
Also with a smart device gateway(model NX-SVG),the model F4H can communicate with major programmable logic controller.


High noise tolerance

The signal circuit is isolated from the power supply.
Thanks to this feature, noise from power wiring has no effect on signals.


Reduction in overall cost

By switching from an analog to a digital connection with PLC, the analog I/O module can be eliminated.



PVD(Physical Vapor Deposition)

MFC supply argon gas to chamber to generate plasma.

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